SiC Horizontal Furnace Process Tube High Thermal Conductivity​​

A Silicon Carbide (SiC) Horizontal Furnace Tube is a high-performance ceramic tube manufactured using ​​reaction sintering or chemical vapor deposition (CVD) processes​​, specifically designed for ​​high-temperature and corrosive industrial environments​​. It serves as a ​​process tube​​, operating in atmospheres containing ​​oxygen, nitrogen, and trace hydrogen chloride​​, with a typical working temperature of ​​1250°C​​ and the capability to withstand even higher temperatures. Its core value lies in leveraging the intrinsic properties of silicon carbide—​​extremely high hardness, high stiffness, low coefficient of thermal expansion, high thermal conductivity, and exceptional chemical stability​​—to ensure ​​outstanding dimensional stability, structural integrity, and long service life​​ under extreme conditions of heat, corrosion, and thermal shock. This provides a reliable high-temperature processing environment for advanced industries such as ​​semiconductor manufacturing and metallurgy​​.

SiC Horizontal Furnace Tube Parameters

SiC Horizontal Furnace Tube Applications

Silicon Carbide Horizontal Furnace Tubes play a critical role in multiple high-end manufacturing sectors due to their superior performance:

1. ​​Semiconductor Manufacturing​​: Used in processes such as ​​diffusion, oxidation, and chemical vapor deposition (CVD)​​ to carry and heat-treat silicon wafers, ensuring ​​process purity and uniformity​​.
2. ​​Photovoltaic Industry​​: Applied in production lines for ​​high-efficiency solar cells (e.g., TOPCon, HJT)​​, supporting silicon wafers in LPCVD equipment for ​​passivation layer deposition, diffusion, and annealing​​.
3. ​Metallurgy and High-Temperature Processing​​: Serves as a furnace tube in ​​non-ferrous metal smelting (e.g., aluminum, copper) and steel manufacturing​​, withstanding corrosion from molten metals and high-temperature loads.
4. ​​Industrial Kilns​​: Used in ​​tunnel kilns and shuttle kilns​​ as ​​high-temperature furnace tubes or kiln furniture​​, enhancing operational efficiency and service life.

SiC Horizontal Furnace Tube Characteristics

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• 3D printed integrated forming​​

• ​​Base material impurity content <300 ppm​​

• ​​CVD silicon carbide coating base material impurity content <5 ppm​​

• ​​High thermal conductivity​​

• ​​High thermal shock stability​

Customized SiC Ceramic Components of ZMSH

ZMSH supports ​​precision custom machining​​ of various silicon carbide (SiC) ceramic products. Whether for special dimensions, complex structures, or specific performance requirements, we can achieve them through processes such as ​​reaction sintering, pressureless sintering, and chemical vapor deposition (CVD)​​. If you have needs for silicon carbide ceramic component design, material selection, or application scenario adaptation, please feel free to inquire. We will provide ​​technical solutions and rapid response services​​.

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Q1: What is the primary application of a silicon carbide horizontal furnace tube?​​

​​A1:​​ It is primarily used in ​​high-temperature processes​​ (up to 1700°C) within ​​semiconductor manufacturing and photovoltaic industries​​, such as ​​diffusion, oxidation, and chemical vapor deposition (CVD)​​, ensuring precise thermal treatment and coating uniformity for wafers and solar cells.

​​Q2: Why choose silicon carbide over traditional materials for horizontal furnace tubes?​​

​​A2:​​ Silicon carbide offers ​​exceptional thermal stability (low CTE ~4.5×10⁻⁶/℃), high thermal conductivity (~45 W/m·K at 1200°C), and superior chemical inertness​​, enabling ​​longer service life, reduced maintenance costs, and reliable performance in corrosive atmospheres​​ (e.g., oxygen, nitrogen, HCl) compared to quartz or metal alternatives.

Tags: #​​SiC Horizontal Furnace Tube, #CVD Coating, #High-Purity, #Customized, #SiC Ceramics​​, #Process Tube, #High Thermal Conductivity​​