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Customized SiC Boats Vertical & Horizontal Wafer Carriers

Marchio:	ZMSH
Numero di modello:	Barche sic
MOQ:	25
prezzo:	by case
Tempo di consegna:	2-4 settimane
Condizioni di pagamento:	T/t

Informazioni dettagliate

Descrizione di prodotto

Informazioni dettagliate

Luogo di origine:

Cina

Certificazione:

rohs

Purezza materiale:

≥99,99%

Coefficiente di espansione termica:

~ 4,5 × 10⁻⁶/° C.

Conducibilità termica:

~ 45 W/(M · K) (@1200 ° C)

forza lexurale:

> 250 MPA

Finitura superficiale:

RA <0,1 μm

Atmosfera lavorativa:

Ossigeno, azoto, cloruro di idrogeno, ecc.

Imballaggi particolari:

Pacchetto in sala di pulizia di 100 gradi

Descrizione di prodotto

SiC Boats Introduction

Customized SiC Boats Vertical & Horizontal Wafer Carriers

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A Silicon Carbide (SiC) Boat is a high-end load-bearing component manufactured from high-purity silicon carbide (SiC) ceramic material, specifically designed for high-temperature, corrosive process environments in the semiconductor and photovoltaic industries. It is primarily categorized into vertical boats and horizontal boats:

Vertical Boats: Typically used in vertical diffusion furnaces for processes such as oxidation and diffusion, where they vertically carry wafers, optimizing space utilization and supporting batch processing.
Horizontal Boats: Suitable for horizontal diffusion furnaces, operating in atmospheres containing oxygen (reaction gas), nitrogen (protective gas), and small amounts of hydrogen chloride. They horizontally carry wafers at temperatures around 1250°C, enabling stable thermal processing.

SiC Boats Key Characteristic Parameters

Parameter Category	Parameter Name	Typical Value/Performance
Material Characteristics	Material Purity	≥99.99%
	Coefficient of Thermal Expansion	~4.5×10⁻⁶/°C
	Thermal Conductivity	~45 W/(m·K) (@1200°C)
	Flexural Strength	>250 MPa
	Maximum Service Temperature	>1600°C (long-term), short-term tolerance up to 1800°C
Functional Characteristics	Surface Finish	Ra < 0.1 μm
	Corrosion Resistance	Resists etching gases like HCl, HF, and molten silicon erosion
	Service Life	Can exceed 5 years (significantly better than quartz boats)
Application Characteristics	Working Atmosphere	Oxygen, nitrogen, hydrogen chloride, etc.
Application Characteristics	Applicable Processes	Oxidation, diffusion, CVD, annealing, etc.

SiC Boats Application Areas

Semiconductor Manufacturing: Used in processes like diffusion, chemical vapor deposition (CVD), annealing, and ion implantation to carry silicon wafers through high-temperature treatments, ensuring process purity and uniformity. They are indispensable core consumables in integrated circuit manufacturing.
Photovoltaic Industry: Widely used in production lines for high-efficiency solar cells like TOPCon, HJT, and PERC. They support silicon wafers in LPCVD equipment for processes such as passivation layer preparation, diffusion, and annealing, enhancing cell conversion efficiency and yield.
LED and Third-Generation Semiconductors: Used in processes like GaN epitaxial growth (MOCVD) to carry sapphire substrates, resisting corrosive gases like NH₃. Also used in SiC crystal growth as seed crystal holders.
New Energy and Research: Applied in high-temperature sintering of lithium battery cathode materials and radioactive material processing in the nuclear industry, requiring resistance to radiation, corrosion, and high temperatures.

Customized SiC Boats Vertical & Horizontal Wafer Carriers 1

SiC Boats Features

Customized SiC Boats Vertical & Horizontal Wafer Carriers 3

Product Features of Silicon Carbide Vertical Boats:

3D printing integrated forming.
Base material impurity content <300 PPM.
CVD silicon carbide coating base material impurity content <5 PPM.
High thermal conductivity.
High thermal shock stability.
Can be customized according to customer designs to create different tooth types and tooth lengths.

Customized SiC Boats Vertical & Horizontal Wafer Carriers 4

Product Features of Silicon Carbide Horizontal Boats:

3D printing integrated forming.
Base material impurity content <300 PPM.
CVD silicon carbide coating base material impurity content <5 PPM.
High thermal shock stability.
Precision tooth machining.

SiC Boats Q&A

Q1: Why choose a silicon carbide (SiC) boat over a quartz boat for semiconductor processing?

A1: SiC boats offer superior high-temperature stability (withstanding up to 1600-1650°C), significantly longer service life (years vs. months for quartz), and extreme resistance to thermal shock and corrosion, reducing particle generation and contamination risks in processes like diffusion and CVD.

Q2: What are the primary applications of silicon carbide (SiC) vertical and horizontal boats?

A2: They are primarily used in semiconductor wafer fabrication (e.g., diffusion, oxidation, CVD, annealing) and high-efficiency solar cell production (e.g., TOPCon, HJT) to carry and heat-treat wafers under extreme conditions, ensuring process purity and yield.

Tags: #SiC Boats, #SiC Crystal Boats, #High-Purity, #Customized, #SiC Ceramics, #Vertical & Horizontal, #Wafer Carriers

Etichette:

Wafer del nitruro di gallio

Wafer dello zaffiro

Sic substrato

Zaffiro Windows ottico

Lastra di silicio di IC

Zaffiro sintetico Rod

Piatto del quarzo fuso

Parti dello zaffiro

Pietra preziosa sintetica

Attrezzatura a semiconduttore

Wafer LiNbO3

Wafer di GaAs

Wafer del fosfuro di indio

substrato ceramico

Involucro del laboratorio